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Our industrial, high throughput diffusion pumps and vapour booster pumps fulfil the requirements of applications like vacuum metallurgy, distillation and coating. Our compact scientific pumps are designed for instrument and general R&D applications. By matching the pump of your choice with appropriate accessories, we offer a complete high vacuum pumping solution for all applications.
Peak pumping speed N2
Peak pumping speed Ar
Peak pumping speed He
Peak pumping speed H2
Maximum backing pressure N2
Units
l/s
l/s
l/s
l/s
mbar
EXT75DX
42
39
49
48
8
nEXT85
47
44
61
49
18
nEXT240
240
230
230
165
9.5
nEXT300
300
280
340
280
9.5
nEXT400
400
380
390
325
9.5
Pumping speed N2
Pumping speed H2
Ultimate Vacuum (CF)
Maximum flow rate
Maximum power consumption
Units
l/s
l/s
mbar
sccm
W
STP301
DN100
300
300
<1x10-10
-
350
STP451
DN160
480
460
<1x10-10
-
350
STP603
DN160
650
550
<1x10-10
-
850
STP1003
DN200
1000
800
<1x10-10
-
850
STPiX455
DN100
300
300
<1x10-10
-
300
STPiX455
DN160
450
460
<1x10-10
-
300
STPiXR1606
DN160
1000
800
<1x10-9
4700
750
STPiXR1606
DN200/250
1600
1200
<1x10-9
4700
750
Pumping speed for N2 NW40
Pumping speed for N2 ISO/ CF63
Backing pump speed 50 Hz (wet)
Backing pump speed 50 Hz (dry)
l/s
l/s
m3/h
m3/h
T-Station 75
42
61
1.6
1.2
T-Station 85
47
84
1.6
1.2
Turbopumping station
42
61
1.6 - 12
1.2 - 22
Peak pumping speed
Ultimate vacuum
Cooling water consumption
Power at ultimate
m3/h
mbar
l/h
kW
EPX180LE
175
<1x10-4
120
1.4
EPX180NE
175
<1x10-4
120
1.6
EPX500LE
500
<1x10-6
120
1.4
EPX500NE
500
<1x10-6
120
1.6
Pumping speed (M&P/C) Nitrogen
Pumping speed (M&P/C) Hydrogen
Minimum backing pump displacement
Oil charge capacity
l/s
l/s
m3/h
ml
Diffstak 63
135
200
5
60
Diffstak 100
280
500
5
125
Diffstak 160
700
1300
12
250
Diffstak 250
2000
3000
40
500
Pumping speed air
Pumping speed hydrogen
Maximum throughput
Recommended backing pump displacement
l/s
l/s
mbar l/s
m3/h
18B4B
4000
6000
100
190
30B5M
12500
15000
300
290
