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General Purpose Residual Gas Analyzer (RGA)
The e-Vision 2 RGA is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money. The e-Vision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have served to make MKS the world leader in RGA products over the widest range of applications - from semiconductor tools or particle accelerators to general industrial applications.
Hardware:
Sensors: Field proven MKS quadrupole mass analyzers, with twin filaments as standard, ensure minimum downtime during critical diagnostic testing. The RGA is available with an optional dual detector including a faraday detector and microchannel plate electron multiplier for detection to e-14 mbar.
Electronics: Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics. This technology prevents large peaks from causing false positive measurements on small peaks. Temperature stabilized critical components mean that signal stability and baseline drift are improved, allowing the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates.
Software
