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Sensitive and Reproducible Gas Process Monitoring & Control
MKS has 30 years of experience developing and delivering state-of-the-art hardware and software products for gas analysis.
Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers. For decades, MKS has been a keen innovator and trusted technology partner in:
By working closely with customers, MKS continues to deliver valuable analytical solutions to address and overcome the toughest challenges in the key markets that are driving today's technology revolution. Focus markets include but are not limited to semiconductor, thin film, flat panel display, solar, aerospace, automotive, vacuum R&D, catalysis, and high energy physics.
R&D > Primary Vacuum Pumps
We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Level
Units
m3/h
mbar
mbar
g/h
dB(A)
nXDS6i
6.2
0.02
0.05
110
52
nXDS10i
11.4
0.007
0.04
145
52
nXDS15i
15.1
0.007
0.04
145
52
nXDS20i
22.0
0.03
0.06
220
52
XDS35i
35
0.01
0.02
240
57
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Level
Units
m3/h
mbar
mbar
g/h
dB(A)
E2M0.7
0.75
3x10-3
2x10-1
8
43
E2M1.5
1.6
3x10-3
2.5x10-2
16
54
E1M18
17
3x10-3
6.5x10-1
650
57
E2M18
17
1x10-3
1.5x10-2
300
57
E2M28
27.5
1x10-3
1.5x10-2
700
57
RV3
3.3
2.0x10-3
3.0x10-2
220
48
RV5
5.1
2.0x10-3
3.0x10-2
220
48
RV8
8.5
2.0x10-3
3.0x10-2
220
48
RV12
12
2.0x10-3
3.0x10-2
290
48
Peak pumping speed
Ultimate vacuum
Motor power
Weight
Units
m3/h
mbar
W
Kg
XDD1
1.2
<2
80
6.5
D-LAB 10-100
0.6
100
100
5.8
D-LAB 10-8
0.6
8
90
6.9
D-LAB 20-100
1.2
100
130
7.1
D-LAB 20-8
1.2
8
120
9.3
D-LAB 34-100
2
100
180
10.3
D-LAB 34-8
2
8
200
12.6
R&D > Primary Vacuum Pumps
We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.
